Heptamethyldisilazane, CAS No. 920-68-3

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920-68-3

Catalog No. EBD2202115

CAS 920-68-3

Name Heptamethyldisilazane

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Basic Information

Synonyms: n,1,1,1-tetramethyl-n-(trimethylsilyl)-silanamin n-1,1,1-tetramethyl-n-(trimethylsilyl)-silanamine 1,1,1,2,3,3,3-heptamethyldisilazane heptamethyldisilazane97% heptamethyldisilazane97+% nn-bis(trimethylsilyl)methylamine99%

Molecular Formula: C7H21NSi2

Molecular Weight: 175.42

MDL Number: MFCD00008262

Categories: Materials Chemistry > Surface Modification and Functional Coatings > Silanes and Alkoxysilanes Synthetic Chemistry > Organometallic Reagents > Organosilicon Reagents

Product Description:

Heptamethyldisilazane (HMDS, CAS 920-68-3) is an organosilicon compound with the formula (CH₃)₃SiNHSi(CH₃)₃. It is a colorless, volatile liquid with a strong ammonia-like odor. It is highly reactive towards moisture and is commonly used as a silylating agent. Its primary industrial application is as a surface modification agent, particularly in the semiconductor and microelectronics industries. It is widely used to create hydrophobic, self-assembled monolayers (SAMs) on silicon wafers and other oxide surfaces (e.g., SiO₂, Al₂O₃). This treatment passivates the surface, improving adhesion for photoresists and acting as a primer in lithography processes. In synthetic chemistry, it serves as a versatile reagent for introducing the trimethylsilyl (TMS) protecting group onto hydroxyl (-OH) and amine (-NH) functionalities, facilitating purification and altering compound solubility. Due to its reactivity with water and alcohols, it must be handled under inert, anhydrous conditions. It is also a key precursor in the synthesis of other organosilicon compounds and is used in the production of silicone polymers and as a catalyst in certain organic reactions.

Physical Properties

Boiling Point: 144-147 °C(lit.)

Flash Point: 28 °C

Density: 0.799 g/mL at 20 °C(lit.)

Solubility: Decomposes

Refractivity: n20/D 1.421(lit.)

Storage: Flammables area

Safety Information

Packing Level: III

Hazard Category: 3

Transport Codes: 1993C

Analytical Data

Appearance: Clear and colorless liquid