Tantalum(V) ethoxide, CAS No. 6074-84-6

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6074-84-6

Catalog No. EBD17714

CAS 6074-84-6

Name Tantalum(V) ethoxide

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Basic Information

Synonyms: tantalum(5+)ethanolate Tantalumvethoxide tantalum(5+)pentaethanolate ethanol-tantalum(5:1) Tantalumethoxide Tantalum(V)ethoxide Ta(OEt)5

Molecular Formula: C10H25O5Ta

Molecular Weight: 406.25

MDL Number: MFCD00049785

Categories: Materials Chemistry > Inorganic and Functional Nanomaterials > Metal Oxide Precursors Synthetic Chemistry > Basic Synthetic Reagents > Inorganic Compounds and Metal Salts

Product Description:

Tantalum(V) ethoxide, with the CAS number 6074-84-6, is a metal-organic compound. It is a colorless to pale yellow liquid or low-melting solid that is highly sensitive to moisture and air, readily hydrolyzing to form tantalum oxide. It is a member of the metal alkoxide family, specifically a tantalum precursor. Its primary and most significant application is as a precursor in materials science, particularly in the sol-gel process and chemical vapor deposition (CVD) for the fabrication of thin films. It is extensively used to produce high-quality tantalum pentoxide (Ta₂O₅) films, which are critical dielectric materials in advanced microelectronics, such as DRAM capacitors, and in optical coatings due to their high refractive index. It also serves as a starting material for synthesizing other tantalum-containing compounds and catalysts. Due to its reactivity, it must be handled under inert atmospheres (e.g., nitrogen or argon) using strict air-free techniques. It is a key specialty chemical in the semiconductor and advanced ceramics industries, where high-purity metal-organic precursors are essential for depositing functional oxide layers.

Physical Properties

Melting Point: 21 °C(lit.)

Boiling Point: 155 °C/0.01 mmHg(lit.)

Flash Point: 29 °C

Density: 1.566 g/mL at 25 °C(lit.)

Refractivity: n20/D 1.487(lit.)

Storage: 2-8°C

Safety Information

Packing Level: II

Hazard Category: 3(8)

Transport Codes: 2920